Documentation recommandée :
- Chang Lui, Foundation of MEMS, Pearson Prentice Hall, Upper Saddle River, 2006.
- Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill, 1998.
- Gabriel M. Rebeiz, RF MEMS: Theory, Design and Technology, John Wiley, 2003.
- T.R. Hsu, MEMS and Microsystems, Design and Manufacture, Mc Graw Hill, 2008.
Sur le Web du cours SYS864 (Moodle)