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Responsable(s) Vahé Nerguizian

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Documentation obligatoire

Documentation recommandée :

  •  Chang Lui, Foundation of MEMS, Pearson Prentice Hall, Upper Saddle River, 2006.
  • Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill, 1998.
  • Gabriel M. Rebeiz, RF MEMS: Theory, Design and Technology, John Wiley, 2003.
  • T.R. Hsu, MEMS and Microsystems, Design and Manufacture, Mc Graw Hill, 2008.

 

Sur le Web du cours SYS864 (Moodle)

  • Les notes de cours.


Ouvrages de références

 

  • Vijay K.Varadan, K.J. Vinoy, K.A. Jose, RF MEMS and their Applications, John Wiley, 2002.
  • De Los Santo, Introduction to Microelectromechanical (MEM) Microwave Systems, Artech House 1999.
  • De Los Santo, RF MEMS Circuit Design for Wireless Communications, Artech House 2002.
  • Madou, Fundamentals of Microfabrication, CRC Press, 2001.
  • Elwenspoek and Jansen, Silicon Micromachining, University Press Cambridge 1998.
  • Keller, Microfabricated High Aspect Ratio Silicon Flexures, MEMS Precision Instruments, 1998.
  • Maluf, An Introduction to Microelectromechanical Systems Engineering, Artech House, 2000.
  • Ristic, Sensor Technology and Devices, Artech House, 1994.
  • S.D. Senturia, Microsystem Design, Kluwer, 2001.
  • Sze, Semiconductor Sensors, John Wiley, 1994.
  • Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim,  Microsensors, MEMS  and Smart Devices, John Wiley 2001.
  • Michael Kohler, Etching in Microsystem Technology, Wiley-VCH.
  • Iwao Fujimasa, Micromachines: A New Era in Mechanical Engineering, Oxford Science Publication.
  • M. Elwenspoek, R. Wiegerink, Mechanical Microsensors, Springer-Verlag.

 

 

Journaux

  • IEEE/JMEMS, Journal of Microelectromechanical Systems.
  • Sensors and Actuators A, B and C.
  • Journal of Micromechanics and Microengineering.
  • Sensors and Materials.
  • IEEE Photonics Technology Letters.
  • Journal of Optical Society of America.
  • Optics Communication.
  • Journal Light Wave Technology.
  • SPIE Proceedings and Journals.
  • Analytical Chemistry.
  • Biomedical Micro Devices.
  • Journals of Nanotechnology
  • JMSM (Journal of Modeling and Simulation of Microsystems); http://www.cr.org/publications/JMSM/.
  • Sensors Update, John Wiley Interscience;
    http://www3.interscience.wiley.com.
  • IEEE Electron Device Letters.
  • Journal of Electrochemical Society.
  • Journal of Vacuum Society.
  • www.inderscience.com (International Journal of Nanotechnology).
  • www.sciencedirect.com.
  • Microsystem      technologies; http://link.springer.de/link/service/journals/00542/index.htm.
  • Canadian Journal of Electrical and Computer engineering (CJECE).
  • CISTI et autres.